Investigation of character and spatial distribution of threading edge dislocations in 4H-SiC epilayers by high-resolution topography - Concepedia

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Investigation of character and spatial distribution of threading edge dislocations in 4H-SiC epilayers by high-resolution topography

59

Citations

6

References

2008

Year

I. Kamata, Masahiro Nagano, Hidekazu Tsuchida, Yi Chen, Michael Dudley

Journal of Crystal Growth

EngineeringEdge DislocationsDislocation InteractionMechanical EngineeringApplied PhysicsSpatial Distribution4H-sic EpilayersSolid MechanicsCarbideMechanics Of MaterialsMicrostructure

References

	Year	Citations

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