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Depth resolution and surface roughness effects in sputter profiling of NiCr multilayer sandwich samples using Auger electron spectroscopy

Materials ScienceSurface CharacterizationAuger Electron SpectroscopyEngineeringElectron MicroscopyPhysicsElectron SpectroscopyNatural SciencesSpectroscopySurface ScienceApplied PhysicsSurface AnalysisInstrumentationMicroelectronicsDepth ResolutionDepth-graded Multilayer CoatingSputter Profiling