Publication | Closed Access
Nanoimprint lithography with ≤60 nm overlay precision
21
Citations
7
References
2012
Year
Materials ScienceEngineeringNanoimprint LithographyElectron-beam LithographyMicrofabricationNanotechnologyBeam LithographyApplied PhysicsNanolithographyNanofabrication3D PrintingNanolithography Method
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