Influence of incoherent superposition of light on ellipsometric coefficients

Abstract

Reflections from the back surface of a transparent substrate influence the evaluation of optical constants of thin films from ellipsometric measurements. If the thickness of the substrate is large compared with the coherence length of the light, the relative phase between the p and s mode, which commonly is measured by ellipsometry, cannot be defined properly. We show how the reflections from the back surface of the substrate are taken into account in ellipsometric measurements by calculating the intensities of reflections for arbitrary angles of polarization. Applications of the new method, such as transmittance ellipsometry, ellipsometry at the back surface of the substrate, and the determination of the optical constants at the substrate-layer interface, are compared with measurements.