Dynamic piezoelectric translation devices

Abstract

The principle of inertial sliding of a platform on a periodically accelerated support is exploited for the design of a piezoelectric fine-positioning device. The device provides step sizes of 0.04–0.2 μ, speeds of up to 0.2 mm/s, and practically unlimited translation range. It is powered by a sawtooth electric waveform of 60–300-V amplitude and useable for loads of up to 1 kg and probably even more. Mechanical parts and driver electronics are extremely simple, reliable, and easy to operate.