Journal of Micromechanics and Microengineering · 1992 · 47 citations · 3 references
EngineeringBiomedical EngineeringOphthalmologyBiomemsMicroelectromechanical SystemsSensorsImplantable MicrodevicesImplantable MicrosystemsIntraocular Pressure MeasurementMicroelectromechanical SensorsPressure MeasurementPressure SensorsCapacitive Pressure SensingCapacitive Pressure SensorsContinuous MonitoringImplantable Pressure SensorsMicromachining Of Silicon WafersSiliconSilicon WafersWireless Pressure Sensors
A system for the continuous monitoring of intra-ocular pressure is described. The sensor is intended for permanent implantation, integrated with an artificial lens. The system consists of a capacitive pressure sensor, determining the resonance frequency of a passive LC network, and a detector, based on the grid-dip technique. The passive pressure sensing element is micromachined from two silicon wafers and connected to a gold-wire coil. Prototype sensors have been evaluated experimentally in vitro. Pressure has been measured remotely, with promising results.
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