Implementation of Second-order Ku-band Chip Filter on Si Substrate with Commercial 0.18μm CMOS Technology

Abstract

This study presents a Ku-band band-pass filter designed and fabricated with a commercial CMOS technology. The filter utilizes a pi-network coupling structure to construct the desired coupling and the resonant tanks on Si substrate with a compact size and the low-loss performance. A method of synthesizing pi-network filter is proposed. A 17GHz filter chip was fabricated by 0.18mum CMOS technology. The size of filter is 0.56mmtimes0.6mm and the measured pass-band insertion loss of filter is about 3.2dB