Selective etching in LiNbO3 combined of MeV O and Si ion implantation with wet-etch technique

Lei Wang, Ke‐Ming Wang, Xuelin Wang, Feng Chen, Yi Jiang, Chuan-Lei Jia, Jiao Yang, Fei Lu, Ding-Yu Shen, Hong‐Ji Ma,

Surface and Coatings Technology · 2006 · 19 citations · 14 references

Concepts

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