Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering

Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films

R. B. Karabalin, Matthew H. Matheny, Philip X.‐L. Feng et al. · Applied Physics Letters · 2009 · 184 citations

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Thermal conductivity of aluminium nitride thin films prepared by reactive magnetron sputtering

C. Duquenne, Pierre‐Yves Tessier, Éric Gautron et al. · Journal of Physics D Applied Physics · 2011 · 118 citations

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Determination of the anisotropic dielectric function for wurtzite AlN and GaN by spectroscopic ellipsometry

S. Shokhovets, R. Goldhahn, G. Gobsch et al. · Journal of Applied Physics · 2003 · 106 citations

Natural Sciences, Materials Engineering, Materials Science +17

<i>In situ</i> measurement of mechanical stress in polycrystalline zinc-oxide thin films prepared by magnetron sputtering

Jimmie Hinze, K. Ellmer · Journal of Applied Physics · 2000 · 102 citations

Natural Sciences, Materials Engineering, Materials Science +15

The thermal stability of AlN

A. Abid, R. Bensalem, B.J. Sealy · Journal of Materials Science · 1986 · 99 citations

Natural Sciences, Materials Engineering, Materials Science +12