Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 37 citations · 12 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsNuclear MaterialsIon ImplantationSemiconductor Device MaterialsSilicon MaterialsRutherford Backscattering SpectrometryRutherford ScatteringSilicon CarbideSilicon Carbide (Sic) Materials
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