From fabrication to mode mapping in silicon nitride microdisks with embedded colloidal quantum dots

Abstract

We report on the fabrication of free-standing and optically active microdisks with cadmium-based colloidal quantum dots embedded directly into silicon nitride. We show that the process optimization results in low-loss silicon nitride microdisks. The Si3N4 matrix provides the stability necessary to preserve the optical properties of the quantum dots and observe efficient coupling of the photoluminescence to the resonating microdisk modes. Using a spectrally and spatially resolved microphotoluminescence measurement, we map the emission pattern from the microdisk. This technique allows us to identify the resonant modes. The results show good agreement with numerical mode simulations.