Concepedia

Publication | Closed Access

Nanoscale dry etching of germanium by using inductively coupled CF4 plasma

DOI

16

Citations

19

References

2012

Year

Kyu-Hwan Shim, Ha Yong Yang, Yeon-Ho Kil, Hyeon Deok Yang, Jong-Han Yang, Woong‐Ki Hong, Sukill Kang, Tae Soo Jeong, Taek Sung Kim
Electronic Materials Letters

References

YearCitations

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