Charging effects of PET under electron beam irradiation in a SEM

Abstract

This paper deals with charge trapping and charge transport of polyethylene terephthalate (PET) polymer subjected to electron irradiation in a scanning electron microscope (SEM). Measurement of displacement current and leakage current using an arrangement adapted to the SEM allows the amount of trapped charge during and after electron irradiation to be determined and the charge mechanisms regulation to be studied. These mechanisms involve several parameters related to the electronic injection, the characteristics of insulator and the effects of the trapped charge itself. The dynamic trapping properties of PET samples are investigated and the time constants of charging are evaluated for various conditions of irradiation. The determination of the trapping cross section for electrons is possible by using the trapping rate at the onset of irradiation.