Microfluidics and Nanofluidics · 2011 · 25 citations · 20 references
EngineeringBiomedical EngineeringBiophysicsBiosensorsFluid DynamicsMicroelectromechanical SystemsFlow MeasurementImpedance SpectroscopyMicrofluidic BiosensorsMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsElectrical ImpedanceMicrochannel FlowMicrochannel HydrodynamicsMicrofluidic FlowMicrofluidic Flow MeasurementMicrofluidic SensingMicrofluidic Sensors
20
MEMS flow sensors for nano-fluidic applications
Shuyun Wu, Qiao Lin, Yin Yuen · Sensors and Actuators A Physical · 2001 · 173 citations
Multi-range silicon micromachined flow sensor
N. Sabaté, J. Santander, L. Fonseca et al. · Sensors and Actuators A Physical · 2003 · 131 citations
Engineering, Electrical Engineering, Mechanical Engineering +14