Thermal decomposition pathway of Ge and Si oxides: observation of a distinct difference - Concepedia

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Thermal decomposition pathway of Ge and Si oxides: observation of a distinct difference

105

Citations

10

References

2000

Year

K. Prabhakaran, Fumihiko Maeda, Yasushi Watanabe, T. Ogino

Thin Solid Films

Materials ScienceMaterials EngineeringDistinct DifferenceEngineeringOxide ElectronicsApplied PhysicsSi OxidesSiliceneGallium OxideThermal Decomposition PathwaySemiconductor Device FabricationThermodynamicsSilicon On Insulator

References

	Year	Citations

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