Electron beam irradiation effects on MOS-transistors and its significance to E-beam testing

Penetration and energy-loss theory of electrons in solid targets

K Kanaya, S. Okayama · Journal of Physics D Applied Physics · 1972 · 1.4K citations

Natural Sciences, Physics, Materials Physics +16

Determination of Kilovolt Electron Energy Dissipation vs Penetration Distance in Solid Materials

T. E. Everhart, Peter Hoff · Journal of Applied Physics · 1971 · 805 citations

Engineering, Materials Science, Physics +13

A Simple Model for Predicting Radiation Effects in MOS Devices

R. F. A. Freeman, Andrew Holmes‐Siedle · IEEE Transactions on Nuclear Science · 1978 · 71 citations

Engineering, Electrical Engineering, Microelectronics +16

The effect of passivation on the observation of voltage contrast in the scanning electron microscope

D.M. Taylor · Journal of Physics D Applied Physics · 1978 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +17

REVERSIBLE CHANGES IN TRANSISTOR CHARACTERISTICS CAUSED BY SCANNING ELECTRON MICROSCOPE EXAMINATION

D. Green, J. E. Sandor, T.W. O'Keeffe et al. · Applied Physics Letters · 1965 · 29 citations

Engineering, Electrical Engineering, Materials Science +11