Publication | Closed Access
High aspect ratio cylindrical nanopores in silicon-on-insulator substrates
14
Citations
32
References
2007
Year
Materials ScienceEngineeringNanoporous MaterialMicrofabricationNanotechnologySurface ScienceApplied PhysicsSilicon-on-insulator SubstratesNanofluidicsSilicon On InsulatorNanopores
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