Co-Implantation and autocompensation in close contact rapid thermal annealing of Si-implanted GaAs:Cr - Concepedia

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Co-Implantation and autocompensation in close contact rapid thermal annealing of Si-implanted GaAs:Cr

25

Citations

17

References

1987

Year

C. W. Farley, T. S. Kim, B. G. Streetman

Journal of Electronic Materials

Materials ScienceSi-implanted GaasEngineeringApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorSemiconductor Device

References

	Year	Citations

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