Journal of Applied Physics · 1992 · 74 citations · 22 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsOptoelectronicsSemiconductor DevicesLaser DiodesLaser PhysicsOptical Properties Of SemiconductorsSemiconductor LasersSemiconductor ReliabilitySurface DegradationActivation EnergyApparent Activation EnergyArrhenius EquationArrhenius KineticsCatastrophic Optical DamagePlasma OxidationPlasma-surface ReactionsQuantum Well Lasers
The time dependence of catastrophic optical mirror damage (COMD) is investigated for cw operation of AlGaAs-GaAs quantum well lasers. The apparent Arrhenius parameters (i.e., the activation energy and pre-exponential factor) for the rate process leading to COMD are determined. In particular, we compare the rate process for various cleaved facets with and without a subsequent plasma oxidation step. Analysis of the experimental Arrhenius parameters indicates that surface reactions on the corroded facets are responsible for facet degradation accompanied by heating. A tentative model of the facet heating that ultimately leads to COMD is presented.
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GaAs Oxidation and the Ga‐As‐O Equilibrium Phase Diagram
C. D. Thurmond, G. P. Schwartz, G. W. Kammlott et al. · Journal of The Electrochemical Society · 1980 · 199 citations