Publication | Closed Access
Microscopic TV holography for MEMS deflection and 3-D surface profile characterization
25
Citations
17
References
2008
Year
Mems DeflectionHolographyEngineeringPhysicsMicrofabricationMicroscopyNatural SciencesSurface ScienceApplied PhysicsHolographic MethodBiomedical EngineeringMicroscopic Tv HolographyMicro-electromechanical SystemMicrofluidics3D PrintingDigital HolographyNanolithography Method
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