Concepedia

Publication | Closed Access

TEM studies of the microstructure evolution in plasma treated CVD TiN thin films used as diffusion barriers

DOI

13

Citations

4

References

1999

Year

S. Ikeda, J. Palleau, J. Torrès, B. Chenevier, N. Bourhila, R. Madar
Solid-State Electronics

References

YearCitations

Page 1