Journal of the European Ceramic Society · 1992 · 27 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistryThin FilmsCastingFabrication MaterialsMetalsSubstrate PreparationThin-film DepositionAluminum NitrideNitride Thin FilmsTape Casting
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