Concepedia

Electrochemical study for the characterisation of wet silicon oxide surfaces

Valérie Bertagna, R. Erre, F. Rouelle, M. Chemla, S. Petitdidier, Davide Levy

Electrochimica Acta · 2001 · 23 citations · 16 references

DOI

Concepts

References

16

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

, , +17

Stability, reactivity and breakdown of passive films. Problems of recent and future research

J.W. Schultze, M.M. Lohrengel · Electrochimica Acta · 2000 · 654 citations

, , +14

The impact of semiconductors on the concepts of electrochemistry

H. Gerischer · Electrochimica Acta · 1990 · 470 citations

, , +10

Handbook of Semiconductor Manufacturing Technology

M. Henini · Microelectronics Journal · 2001 · 312 citations

, , +11

In Situ Characterization of Anodic Silicon Oxide Films by AC Impedance Measurements

Patrik Schmuki, H. Böhni, J. A. Bardwell · Journal of The Electrochemical Society · 1995 · 88 citations

, , +15