Concepedia

Publication | Closed Access

The influence of ion-implantation damage on hydrogen-induced ion-cut

DOI

19

Citations

17

References

2001

Year

T. Höchbauer, Amit Misra, R.D. Verda, Yi Zheng, S.S. Lau, J. W. Mayer, M. Nastasi
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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