Friction and Wear Behavior of Hard Carbon Films

Abstract

The friction and wear properties of hard carbon films deposited by a hot cathode glow discharge in ethylene or methane were examined by using a reciprocating tribometer in vacuum and in air. A hard carbon film composed of mixed diamond and graphite crystal shows high friction in vacuum. On the other hand, hard carbon amorphous film containing hydrogen shows an extremely low friction coefficient on the order of 0.01 in vacuum.