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Analysis of the expanding thermal argon–oxygen plasma gas phase

35

Citations

33

References

2003

Year

Abstract

An expanding thermal argon plasma into which oxygen is injected has been analyzed by means of Langmuir and Pitot probe measurements. Information is obtained on the ion d. profile and the flow pattern in the downstream plasma. A combination of Langmuir and Pitot probe measurements provide information on the total ion flux generated by the plasma source (cascaded arc). It has been found that the ion diffusion is mainly detd. by the background pressure in the expansion vessel and the arc current. The ion d. is detd. by the total power input into the plasma as well as the gas flow in the plasma source. There is an optimum in the power transfer used for ionization from plasma source to the feed gas. Interaction of oxygen with the plasma results in a decrease in the argon ion d. and the plasma beam radius. The recirculation pattern of the downstream plasma has been investigated exptl. using the Pitot probe. Due to the low downstream pressure (10-30 Pa), the conventional compressible Pitot probe theory no longer applies. It is concluded that viscous effects start to play an important role at these low pressures and should be taken into account in the anal. of the Pitot probe measurements

References

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