Simple temperature compensation of thermal air-flow sensor

A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications

R. G. Johnson, Robert E. Higashi · Sensors and Actuators · 1987 · 141 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

Integrated micro flow control systems

M. Esashi · Sensors and Actuators A Physical · 1990 · 77 citations

Engineering, Mechanical Engineering, Systems Engineering +12

A micromachined flow sensor for liquid and gaseous fluids

F. Köhl, A. Jachimowicz, Johannes Steurer et al. · Sensors and Actuators A Physical · 1994 · 39 citations

Engineering, Chemical Engineering, Mechanical Engineering +14

Characteristics of a thermal gas flowmeter

Kin-ichi Komiya, Fumiya HIGUCHI, K. Ohtani · Review of Scientific Instruments · 1988 · 35 citations

Engineering, Chemical Engineering, Physics +17

Monolithic pressure-flow sensor

Osamu Tabata, Hazime Inagaki, Isemi Igarashi · IEEE Transactions on Electron Devices · 1987 · 31 citations

Engineering, Biomedical Engineering, Mechanical Engineering +17