Publication | Closed Access
Close-packed arrays of transition-edge x-ray microcalorimeters with high spectral resolution at 5.9keV
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Citations
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References
2008
Year
X-ray SpectroscopyEngineeringMicroscopyTransition-edge X-ray MicrocalorimetersX-ray ImagingHigh Fill-factor ArraysOptical PropertiesCalibrationSuperconductivityInstrumentationClose-packed ArraysElectrical EngineeringPhysicsSynchrotron RadiationMicroelectronicsX-ray Free-electron LaserX-ray AbsorberX-ray EnergyMicrofabricationNatural SciencesSpectroscopyX-ray DiffractionApplied PhysicsHigh Spectral ResolutionX-ray Optic
We present measurements of high fill-factor arrays of superconducting transition-edge x-ray microcalorimeters designed to provide rapid thermalization of the x-ray energy. We designed an x-ray absorber that is cantilevered over the sensitive part of the thermometer itself, making contact only at normal-metal features. With absorbers made of electroplated gold, we have demonstrated an energy resolution between 2.4 and 3.1eV at 5.9keV on 13 separate pixels. We have determined the thermal and electrical parameters of the devices throughout the superconducting transition and, using these parameters, have modeled all aspects of the detector performance.
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