Concepedia

Publication | Closed Access

Effects of silicide formation on the removal of end-of-range ion implantation damage in silicon

DOI

19

Citations

6

References

1989

Year

W. Lur, Jay Cheng, C. H. Chu, M.H. Wang, T.C. Lee, Y.J. Wann, L.J. Chen
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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