Modelling of anisotropic etching in silicon-based sensor application - Concepedia

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Modelling of anisotropic etching in silicon-based sensor application

22

Citations

4

References

1992

Year

Henri Camon, Anne Marie Gué, J.S. Danel, M. Djafari-Rouhani

Sensors and Actuators A Physical

EngineeringMicrofabricationApplied PhysicsSilicon-based Sensor ApplicationSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsPlasma Etching

References

	Year	Citations

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