Modelling of anisotropic etching in silicon-based sensor application

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: II . Influence of Dopants

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 377 citations

Engineering, Materials Engineering, Materials Science +17

Use of Modified Free Energy Theorems to Predict Equilibrium Growing and Etching Shapes

R. J. Jaccodine · Journal of Applied Physics · 1962 · 100 citations

Natural Sciences, Materials Engineering, Materials Science +13

Micro-machining: A survey of the most commonly used processes

Gilles Delapierre · Sensors and Actuators · 1989 · 53 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +12

Anisotropic etching of silicon. a model diffusion-controlled reaction

D.M. Allen, I.A. Routledge · IEE Proceedings I Solid State and Electron Devices · 1983 · 12 citations

Engineering, Materials Engineering, Materials Science +13