Integration of diamond in fully-depleted silicon-on-insulator technology as buried insulator: A theoretical analysis - Concepedia

Concepedia

Publication | Open Access

Integration of diamond in fully-depleted silicon-on-insulator technology as buried insulator: A theoretical analysis

DOI Full Paper Access

12

Citations

14

References

2008

Year

Jean-Paul Mazellier, Olivier Faynot, S. Cristoloveanu, S. Deleonibus, P. Bergonzo

Diamond and Related Materials

Theoretical AnalysisElectrical EngineeringDiamond-like CarbonEngineeringApplied PhysicsSemiconductor Device FabricationFully-depleted Silicon-on-insulator TechnologyBuried InsulatorSilicon On InsulatorMicroelectronicsElectrical Insulation

References

	Year	Citations

Page 1