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A millimeter-range flexure-based nano-positioning stage using a self-guided displacement amplification mechanism

EngineeringMicrofabricationNanotechnologyMechanical EngineeringApplied PhysicsNano Electro Mechanical SystemNanofabricationFlexible SensorMicroelectronicsMicro-electromechanical SystemMicromachined Ultrasonic Transducer