Concepedia

Residual layer thickness in nanoimprint: Experiments and coarse-grain simulation

N. Kehagias, Vincent Reboud, A.A. Svintsov, S. I. Zaitsev

Microelectronic Engineering · 2008 · 17 citations · 2 references

DOI

Concepts

References

2

Recent progress in nanoimprint technology and its applications

L. Jay Guo · Journal of Physics D Applied Physics · 2004 · 726 citations · Full text

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Coarse-grain method for modeling of stamp and substrate deformation in nanoimprint

A.A. Svintsov, Helmut Schift, S. I. Zaitsev · Microelectronic Engineering · 2007 · 25 citations

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