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Atomic force microscopy based repeatable surface nanomachining for nanochannels on silicon substrates

Materials ScienceAtomic Force MicroscopyRepeatable SurfaceEngineeringFlexible ElectronicsMicrofabricationNanotechnologyApplied PhysicsScanning Force MicroscopyNano Electro Mechanical SystemSilicon SubstratesMicrofluidicsNanolithography Method