Observation of surface reconstruction and nano-fabrication on silicon under high temperature using a UHV-STM - Concepedia

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Observation of surface reconstruction and nano-fabrication on silicon under high temperature using a UHV-STM

29

Citations

13

References

1992

Year

M. Iwatsuki, Shinichi Kitamura, T. Satô, Takashi Sueyoshi

Applied Surface Science

Materials ScienceWafer Scale ProcessingEngineeringMicrofabricationSurface ScienceApplied PhysicsSurface EngineeringSemiconductor Device FabricationNanofabricationElectronic PackagingSilicon On InsulatorHigh TemperatureSurface Reconstruction

References

	Year	Citations

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