Search for carbon nitride CNx compounds with a high nitrogen content by electron cyclotron resonance plasma deposition - Concepedia

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Search for carbon nitride CNx compounds with a high nitrogen content by electron cyclotron resonance plasma deposition

68

Citations

15

References

1994

Year

Mustapha Diani, Azzam N. Mansour, L. K�ubler, J.L. Bischoff, D. Bolmont

Diamond and Related Materials

Materials ScienceChemical EngineeringCarbon Nitride CnxEngineeringBoron NitrideCarbon-based MaterialNanoelectronicsChemistryHigh Nitrogen ContentCarbon-based Films

References

	Year	Citations

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