Development of a high-selectivity process for electron cyclotron resonance plasma etching of II-VI semiconductors - Concepedia

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Development of a high-selectivity process for electron cyclotron resonance plasma etching of II-VI semiconductors

26

Citations

12

References

2002

Year

A. J. Stoltz, J. D. Benson, M. L. Thomas, P. R. Boyd, M. Martinka, J. H. Dinan

Journal of Electronic Materials

SemiconductorsHigh-selectivity ProcessElectrical EngineeringEngineeringPhysicsIi-vi SemiconductorsNanoelectronicsApplied PhysicsSemiconductor Device FabricationMicroelectronicsPlasma EtchingOptoelectronicsPlasma ProcessingCompound Semiconductor

References

	Year	Citations

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