An electro-optical sensor for microdisplacement measurement and control

Abstract

Development of a new type of noncontact electrooptical sensor based on the optical triangulation principle is presented. The sensor exhibits maximum sensitivity with a resolution of 0.01 mu m for the displacement of polished flat surfaces. The sensitivity of displacement of curved and rough surfaces is also good. The experimental set-up described provides a linear range of +or-75 mu m which could be increased by changing the optical parameters of the sensor, if needed.