Method to assess the grain crystallographic orientation with a submicronic spatial resolution using Kelvin probe force microscope

Abstract

In thin polycrystalline copper film, a direct correlation between the grain crystallographic orientation and the work function has been evidenced by comparing Kelvin probe force microscope (KFM) mapping and electron backscattered diffraction analysis performed over the same region. As a result, work function mapping provided by KFM technique can be used to assess the crystallographic properties of thin layers with a spatial resolution better than 100nm.