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Electron cyclotron resonance plasma enhanced chemical vapour deposition and optical properties of SiOx thin films

Materials ScienceOptical MaterialsEngineeringChemical Vapour DepositionOptical PropertiesSurface ScienceApplied PhysicsSiox Thin FilmsChemical Vapor DepositionThin FilmsChemical DepositionOptoelectronicsPlasma ProcessingThin Film Processing