Publication | Closed Access
A study on the elimination of micro-cracks in a sparked silicon surface
12
Citations
5
References
2001
Year
Materials EngineeringEngineeringPhysicsMicrofabricationSparked Silicon SurfaceSurface ScienceDefect FormationSemiconductor Device FabricationSilicon On InsulatorDefect ToleranceMicrostructureSilicon Debugging
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