Sensors and Actuators B Chemical · 2003 · 111 citations · 5 references
EngineeringMaterials EngineeringMaterials ScienceBiosensorsElectronic MaterialsSensorsChemical SensorsGas SensorsMems SensorsNanosensorsSensor FundamentalsSensor MaterialsPorous SiliconSilicon DioxideSilicon Nitride
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Free charge carriers in mesoporous silicon
V. Yu. Timoshenko, Th. Dittrich, Vladimir Lysenko et al. · Physical review. B, Condensed matter · 2001 · 99 citations
Front-side micromachined porous silicon nitrogen dioxide gas sensor
C. Baratto, G. Faglia, Giorgio Sberveglieri et al. · Thin Solid Films · 2001 · 63 citations