In situ quadrupole mass spectroscopy studies of water and solvent coordination to copper(II) β-diketonate precursors: implications for the chemical vapor deposition of copper

Zheng Bo, Cindy Goldberg, Eric Eisenbraun, Jun Liu, Alain E. Kaloyeros, Paul J. Toscano, S. P. Murarka, James F. Loan, John J. Sullivan

Materials Chemistry and Physics · 1995 · 10 citations · 17 references

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