Thin Solid Films · 1998 · 14 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsChemical Vapor DepositionCoatingsElectronic Material CharacterizationThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsGermanium ChemistryPlasma-enhanced Deposition
12
Vibrational Spectra of Hydrogen in Silicon and Germanium
M. Cardona · physica status solidi (b) · 1983 · 533 citations
Reactive plasma deposited SixCyHz films
Y. Catherine, G. Turban · Thin Solid Films · 1979 · 119 citations
J. Tyczkowski, P. Kazimierski, H. Szymanowski · Thin Solid Films · 1994 · 29 citations
Natural Sciences, Materials Engineering, Materials Science +17