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Deposition and properties of germanium/carbon films deposited from tetramethylgermanium in a parallel plate RF discharge

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringSurface ScienceApplied PhysicsGermanium/carbon FilmsChemical DepositionGas Discharge PlasmaChemical Vapor DepositionElectrical InsulationGermanene