Concepedia

Publication | Closed Access

Optical emission spectroscopy study of r.f. magnetron sputtering discharge used for multilayers thin film deposition

DOI

58

Citations

15

References

2003

Year

G. Zambrano, Henry Riascos, P. Prieto, E. Restrepo, A. Devia, Christopher Rincon
Surface and Coatings Technology

References

YearCitations

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