Optical shortpass filters based on macroporous silicon

Abstract

A promising class of optical filters is introduced, based on diffraction at small apertures. The filters consist of straight pores with diameters in the micrometer regime and a length of up to one millimeter through a silicon wafer. In contrast to Bragg, Woods, or glass filters, the light is not transmitted in matter but in the medium inside the pores. The filters therefore show a true shortpass characteristic. Due to constructive interference between the high number of pores in an array, macropore filters are of high optical quality and may replace conventional filters in imaging systems.