Machining of submicron structures on metals and semiconductors by ultrashort UV-laser pulses - Concepedia

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Machining of submicron structures on metals and semiconductors by ultrashort UV-laser pulses

127

Citations

11

References

1996

Year

P. Šimon, J. Ihlemann

Applied Physics A

Materials ScienceAdvanced Laser ProcessingEngineeringLaser Micro-processingMicrofabricationSubmicron StructuresMechanical EngineeringApplied PhysicsLaser AblationMaterial MachiningLaser Processing TechnologyUltrashort Uv-laser PulsesLaser-assisted Deposition

References

	Year	Citations

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