Concepedia

Chemical etching of (100) GaAs in a sulphuric acid-hydrogen peroxide-water system

Irena Barycka, Irena Zubel

Journal of Materials Science · 1987 · 21 citations · 10 references

DOI

Concepts

References

10

Chemical Etching of Silicon: IV . Etching Technology

B. Schwartz, Harry Robbins · Journal of The Electrochemical Society · 1976 · 350 citations

, , +17

Chemical Etching Characteristics of  ( 001 ) InP

Sadao Adachi, Hitoshi Kawaguchi · Journal of The Electrochemical Society · 1981 · 151 citations · Full text

, , +14

Selective Etching of Gallium Arsenide Crystals in H[sub 2]SO[sub 4]-H[sub 2]O[sub 2]-H[sub 2]O System

Shinya Iida, Kazuhiro Ito · Journal of The Electrochemical Society · 1971 · 148 citations

, , +17

Chemical Etching Characteristics of  ( 001 ) GaAs

Sadao Adachi, Kunishige Oe · Journal of The Electrochemical Society · 1983 · 100 citations

, , +17

A New Etching Solution System,  H 3 PO 4 ‐  H 2 O 2 ‐  H 2 O  , for GaAs and Its Kinetics

Yoshifumi Mori, N. Watanabe · Journal of The Electrochemical Society · 1978 · 82 citations

, , +17