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Design and fabrication of an overhanging xy-microactuator with integrated tip for scanning surface profiling

DOIFull Paper Access

37

Citations

16

References

1994

Year

P.-F. Indermuehle, Christian Linder, Juergen Brügger, V.P. Jaecklin, N. F. de Rooij
Sensors and Actuators A Physical

References

YearCitations

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