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Thermal dewetting of Pt thin film: Etch-masks for the fabrication of semiconductor nanostructures

Materials ScienceThermal DewettingEngineeringMicrofabricationNanomaterialsNanotechnologySurface ScienceApplied PhysicsFabrication TechniquePt Thin FilmThin Film Process TechnologyThin FilmsPlasma EtchingNanolithography MethodThin Film ProcessingSemiconductor Nanostructures